Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2019-10-22 |
| 10249475 | Cooling mechanism utlized in a plasma reactor with enhanced temperature regulation | Aniruddha Pal, Victor Calderon, Valentin N. Todorow | 2019-04-02 |
| 10204805 | Thin heated substrate support | Imad Yousif, Paul B. Reuter, Aniruddha Pal, Jared Ahmad Lee | 2019-02-12 |