Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468282 | Method and apparatus for substrate transfer and radical confinement | Martin Jeff Salinas, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2019-11-05 |
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2019-10-22 |
| 10276354 | Segmented focus ring assembly | Paul B. Reuter | 2019-04-30 |
| 10204805 | Thin heated substrate support | Imad Yousif, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2019-02-12 |