Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468282 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeff Salinas, Paul B. Reuter, Imad Yousif | 2019-11-05 |
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2019-10-22 |
| 10249475 | Cooling mechanism utlized in a plasma reactor with enhanced temperature regulation | Victor Calderon, Martin Jeffrey Salinas, Valentin N. Todorow | 2019-04-02 |
| 10204805 | Thin heated substrate support | Imad Yousif, Martin Jeffrey Salinas, Paul B. Reuter, Jared Ahmad Lee | 2019-02-12 |