Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483116 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Knapp, David Thompson, Jeffrey W. Anthis | 2019-11-19 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2019-06-18 |