Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522375 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Ralf Hofmann, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2019-12-31 |
| 10209613 | System and method for manufacturing planarized extreme ultraviolet lithography blank | Cara Beasley, Ralf Hofmann, Timothy Michaelson | 2019-02-19 |
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2019-02-05 |