Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466596 | System and method for field-by-field overlay process control using measured and estimated field parameters | Bill Pierson, Ramkumar Karur-Shanmugam, Chin-Chou Huang, Ady Levy | 2019-11-05 |
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, Amnon Manassen, William Pierson, Ady Levy, Pradeep Subrahmanyan +4 more | 2019-09-10 |