Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509329 | Breakdown analysis of geometry induced overlay and utilization of breakdown analysis for improved overlay control | Sathish Veeraraghavan | 2019-12-17 |
| 10466596 | System and method for field-by-field overlay process control using measured and estimated field parameters | Bill Pierson, Ramkumar Karur-Shanmugam, Ady Levy, John Robinson | 2019-11-05 |