Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466596 | System and method for field-by-field overlay process control using measured and estimated field parameters | Ramkumar Karur-Shanmugam, Chin-Chou Huang, Ady Levy, John Robinson | 2019-11-05 |