Issued Patents 2019
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495582 | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser | Yujun Deng, Yung-Ho Alex Chuang | 2019-12-03 |
| 10466212 | Scanning electron microscope and methods of inspecting and reviewing samples | David L. Brown, Yung-Ho Alex Chuang, Marcel Trimpl, Jingjing Zhang, Devis Contarato +1 more | 2019-11-05 |
| 10462391 | Dark-field inspection using a low-noise sensor | Yung-Ho Alex Chuang, David L. Brown, Devis Contarato, Daniel Kavaldjiev, Guoheng Zhao +4 more | 2019-10-29 |
| 10446696 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, Gildardo Delgado, David L. Brown, Yung-Ho Alex Chuang | 2019-10-15 |
| 10439355 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski | 2019-10-08 |
| 10429719 | 183 nm CW laser and inspection system | Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, Vladimir Dribinski | 2019-10-01 |
| 10313622 | Dual-column-parallel CCD sensor and inspection systems using a sensor | Yung-Ho Alex Chuang, Jingjing Zhang, Sharon Zamek, Devis Contarato, David L. Brown | 2019-06-04 |
| 10269842 | Anti-reflection layer for back-illuminated sensor | Masaharu Muramatsu, Hisanori Suzuki, Yasuhito Yoneta, Shinya Otsuka, Jehn-Huar Chern +3 more | 2019-04-23 |
| 10199197 | Photocathode including silicon substrate with boron layer | Yung-Ho Alex Chuang | 2019-02-05 |
| 10199149 | 183NM laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Vladimir Dribinski, Jidong Zhang | 2019-02-05 |
| 10197501 | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors | Yung-Ho Alex Chuang, Xuefeng Liu, David L. Brown | 2019-02-05 |
| 10194108 | Sensor with electrically controllable aperture for inspection and metrology systems | Yung-Ho Alex Chuang, David L. Brown, Jingjing Zhang, Keith Lyon, Mark Wang | 2019-01-29 |
| 10175555 | 183 nm CW laser and inspection system | Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, Vladimir Dribinski | 2019-01-08 |