Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10439355 | 193nm laser and inspection system | Yung-Ho Alex Chuang, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2019-10-08 |
| 10199149 | 183NM laser and inspection system | Yung-Ho Alex Chuang, Yujun Deng, Vladimir Dribinski, John Fielden, Jidong Zhang | 2019-02-05 |
| 10193293 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, Justin Dianhuan Liou, Vladimir Dribinski, David L. Brown | 2019-01-29 |