Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395916 | In-situ pre-clean for selectivity improvement for selective deposition | Kai Wu, Vikash Banthia, Sang Ho Yu, Mei Chang | 2019-08-27 |
| 10256144 | Process integration approach of selective tungsten via fill | He Ren, Yu Lei, Kai Wu, Mehul Naik, Zhiyuan Wu +2 more | 2019-04-09 |