Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438849 | Microwave anneal to improve CVD metal gap-fill and throughput | He Ren, Jie Zhou, Guannan Chen, Michael W. Stowell, Bencherki Mebarki +3 more | 2019-10-08 |
| 10410918 | Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping | Nikolaos Bekiaris, Mehul Naik, Jin-Hee Park, Mark Lee | 2019-09-10 |
| 10256144 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Yu Lei, Kai Wu, Mehul Naik +2 more | 2019-04-09 |