Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438849 | Microwave anneal to improve CVD metal gap-fill and throughput | He Ren, Jie Zhou, Guannan Chen, Michael W. Stowell, Bencherki Mebarki +3 more | 2019-10-08 |
| 10410918 | Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping | Zhiyuan Wu, Mehul Naik, Jin-Hee Park, Mark Lee | 2019-09-10 |