Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438849 | Microwave anneal to improve CVD metal gap-fill and throughput | He Ren, Jie Zhou, Michael W. Stowell, Bencherki Mebarki, Mehul Naik +3 more | 2019-10-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438849 | Microwave anneal to improve CVD metal gap-fill and throughput | He Ren, Jie Zhou, Michael W. Stowell, Bencherki Mebarki, Mehul Naik +3 more | 2019-10-08 |