Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10400335 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Joel M. Huston, Mei Chang | 2019-09-03 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more | 2019-06-18 |
| 10312475 | CVD thin film stress control method for display application | Tae Kyung Won, Soo Young Choi, Sanjay Yadav, Carl A. Sorensen, Suhail Anwar +1 more | 2019-06-04 |