Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10400327 | Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor | Mohammad Kamruzzaman Chowdhury, Adolph Miller Allen | 2019-09-03 |
| 10400335 | Dual-direction chemical delivery system for ALD/CVD chambers | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2019-09-03 |
| 10334184 | Electronic device with light diffuser | Ligang Wang, Miodrag Scepanovic, Neil MacKinnon | 2019-06-25 |
| 10266940 | Auto capacitance tuner current compensation to control one or more film properties through target life | Vivek Gupta, Adolph Miller Allen, Ryan Edwin Hanson | 2019-04-23 |
| 10242873 | RF power compensation to control film stress, density, resistivity, and/or uniformity through target life | Adolph Miller Allen | 2019-03-26 |