Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10266940 | Auto capacitance tuner current compensation to control one or more film properties through target life | Zhenbin Ge, Vivek Gupta, Adolph Miller Allen | 2019-04-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10266940 | Auto capacitance tuner current compensation to control one or more film properties through target life | Zhenbin Ge, Vivek Gupta, Adolph Miller Allen | 2019-04-23 |