Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10400327 | Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor | Mohammad Kamruzzaman Chowdhury, Zhenbin Ge | 2019-09-03 |
| 10347475 | Holding assembly for substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Goichi Yoshidome, Christopher Pavloff | 2019-07-09 |
| 10283334 | Methods and apparatus for maintaining low non-uniformity over target life | William Johanson, Fuhong Zhang, Yu Liu | 2019-05-07 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee +2 more | 2019-05-07 |
| 10266940 | Auto capacitance tuner current compensation to control one or more film properties through target life | Zhenbin Ge, Vivek Gupta, Ryan Edwin Hanson | 2019-04-23 |
| 10242873 | RF power compensation to control film stress, density, resistivity, and/or uniformity through target life | Zhenbin Ge | 2019-03-26 |