Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283334 | Methods and apparatus for maintaining low non-uniformity over target life | William Johanson, Fuhong Zhang, Adolph Miller Allen | 2019-05-07 |
| D837755 | Target profile for a physical vapor deposition chamber target | Martin Lee Riker, Fuhong Zhang | 2019-01-08 |