Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D869409 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Xiaodong Wang | 2019-12-10 |
| D868124 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Zheng Wang | 2019-11-26 |
| 10438828 | Methods and apparatus to prevent interference between processing chambers | Fuhong Zhang, Sunil Kumar Garg, Paul Kiely, William Fruchterman, Zheng Wang +1 more | 2019-10-08 |
| D859333 | Collimator for a physical vapor deposition chamber | Lanlan Zhong, Fuhong Zhang, Zheng Wang | 2019-09-10 |
| D858468 | Collimator for a physical vapor deposition chamber | Lanlan Zhong, Fuhong Zhang, Zheng Wang | 2019-09-03 |
| 10347474 | Biasable flux optimizer / collimator for PVD sputter chamber | Fuhong Zhang, Anthony Infante, Zheng Wang | 2019-07-09 |
| 10312065 | Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control | Keith A. Miller, Shreekant Gayaka, Carl Johnson | 2019-06-04 |
| D837755 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu | 2019-01-08 |