Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480064 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2019-11-19 |
| 10424477 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore | 2019-09-24 |
| 10410857 | Formation of SiN thin films | Toshiya Suzuki, Viljami Pore, Ryoko Yamada, Dai Ishikawa, Kunitoshi Namba | 2019-09-10 |
| 10395917 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2019-08-27 |
| 10262854 | Deposition of SiN | Viljami Pore, Ryoko Yamada, Antti Niskanen | 2019-04-16 |