Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410857 | Formation of SiN thin films | Toshiya Suzuki, Viljami Pore, Shang Chen, Dai Ishikawa, Kunitoshi Namba | 2019-09-10 |
| 10344643 | Exhaust purification system of internal combustion engine | Shinichiro Otsuka, Kenji Katayama, Noritaka Masumitsu | 2019-07-09 |
| 10262854 | Deposition of SiN | Shang Chen, Viljami Pore, Antti Niskanen | 2019-04-16 |