Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510530 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2019-12-17 |
| 10480064 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2019-11-19 |
| 10410857 | Formation of SiN thin films | Toshiya Suzuki, Viljami Pore, Shang Chen, Ryoko Yamada, Dai Ishikawa | 2019-09-10 |