Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510530 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2019-12-17 |
| 10480064 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2019-11-19 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +2 more | 2019-10-29 |
| 10443123 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +1 more | 2019-10-15 |
| 10424477 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore | 2019-09-24 |
| 10395917 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2019-08-27 |
| 10262854 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2019-04-16 |
| 10204790 | Methods for thin film deposition | Jun Kawahara, Suvi Haukka, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2019-02-12 |