Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460928 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2019-10-29 |
| 10453701 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2019-10-22 |
| 10373820 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2019-08-06 |
| 10204790 | Methods for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2019-02-12 |