Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10312096 | Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursor | Hua Chung, Matthias Bauer, Schubert S. Chu | 2019-06-04 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Daniel Redfield, Joseph M. Ranish +6 more | 2019-05-28 |
| 10224421 | Self-aligned process for sub-10nm fin formation | Zhiyuan Ye, Xinyu BAO, Chun Yan, Hua Chung, Schubert S. Chu | 2019-03-05 |
| 10202707 | Substrate processing system with lamphead having temperature management | Joseph M. Ranish, Paul Brillhart, Dongming Iu | 2019-02-12 |