| 10486183 |
Methods and apparatus for delivering process gases to a substrate |
— |
2019-11-26 |
| 10468242 |
Lamp cross-section for reduced coil heating |
— |
2019-11-05 |
| 10458040 |
Upper dome with injection assembly |
Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more |
2019-10-29 |
| 10453670 |
Simplified lamp design |
— |
2019-10-22 |
| 10409306 |
Apparatus and methods for low temperature measurement in a wafer processing system |
— |
2019-09-10 |
| 10410890 |
Light pipe window structure for thermal chamber applications and processes |
Aaron Muir Hunter, Anzhong Chang |
2019-09-10 |
| 10405375 |
Lamphead PCB with flexible standoffs |
Oleg V. Serebryanov, Dongming Iu |
2019-09-03 |
| 10376916 |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control |
Kailash Kiran Patalay |
2019-08-13 |
| 10373859 |
Support ring with masked edge |
Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa |
2019-08-06 |
| 10332763 |
Lamp driver for low pressure environment |
Oleg V. Serebryanov, Alexander Goldin |
2019-06-25 |
| 10327284 |
Diffuser for lamp heating assembly |
— |
2019-06-18 |
| 10319579 |
Adapter for replaceable lamp |
Oleg V. Serebryanov |
2019-06-11 |
| 10306708 |
Absorbing reflector for semiconductor processing chamber |
Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more |
2019-05-28 |
| 10271382 |
Circular lamp arrays |
— |
2019-04-23 |
| 10271383 |
Lamp base adapter design for baseless lamps |
Aaron Miller, Oleg V. Serebryanov |
2019-04-23 |
| 10256005 |
Rotating substrate laser anneal |
Shashank Sharma, Diwakar Kedlaya, Aaron Muir Hunter |
2019-04-09 |
| 10202707 |
Substrate processing system with lamphead having temperature management |
Paul Brillhart, Satheesh Kuppurao, Dongming Iu |
2019-02-12 |
