Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10376916 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2019-08-13 |
| 10345155 | Model based lamp background filtration of stray radiation for pyrometry | Aaron Muir Hunter | 2019-07-09 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2019-05-28 |