Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490406 | Systems and methods for material breakthrough | Mang-Mang Ling, Tom Choi, Nitin K. Ingle | 2019-11-26 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2019-08-06 |
| 10354889 | Non-halogen etching of silicon-containing materials | Tom Choi, Mang-Mang Ling, Nitin K. Ingle | 2019-07-16 |