Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490406 | Systems and methods for material breakthrough | Mandar B. Pandit, Tom Choi, Nitin K. Ingle | 2019-11-26 |
| 10424487 | Atomic layer etching processes | Jungmin Ko, Tom Choi, Junghoon Kim, Sean S. Kang | 2019-09-24 |
| 10354889 | Non-halogen etching of silicon-containing materials | Tom Choi, Mandar B. Pandit, Nitin K. Ingle | 2019-07-16 |