Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002764 | Sputter etch material selectivity | Kevin Anglin, Morgan Evans, John Hautala, Heyun Yin | 2018-06-19 |
| 9929015 | High efficiency apparatus and method for depositing a layer on a three dimensional structure | Thomas R. Omstead, Simon Ruffell, Ethan A. Wright, John Hautala | 2018-03-27 |
| 9885957 | Ion-assisted deposition and implantation of photoresist to improve line edge roughness | Maureen Petterson, John Hautala | 2018-02-06 |