Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109494 | FinFet spacer etch with no fin recess and no gate-spacer pull-down | — | 2018-10-23 |
| 10008384 | Techniques to engineer nanoscale patterned features using ions | John Hautala, Adam Brand, Huixiong Dai | 2018-06-26 |
| 9984889 | Techniques for manipulating patterned features using ions | Huixiong Dai, Jun Lang, John Hautala | 2018-05-29 |
| 9934981 | Techniques for processing substrates using directional reactive ion etching | Steven R. Sherman, John Hautala, Adam Brand | 2018-04-03 |
| 9929015 | High efficiency apparatus and method for depositing a layer on a three dimensional structure | Thomas R. Omstead, Tristan Y. Ma, Ethan A. Wright, John Hautala | 2018-03-27 |