Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121966 | Semiconductor device structures including silicon-containing dielectric materials | Cole S. Franklin | 2018-11-06 |
| 9929015 | High efficiency apparatus and method for depositing a layer on a three dimensional structure | Simon Ruffell, Tristan Y. Ma, Ethan A. Wright, John Hautala | 2018-03-27 |