Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934981 | Techniques for processing substrates using directional reactive ion etching | Simon Ruffell, John Hautala, Adam Brand | 2018-04-03 |
| 9934982 | Etch rate modulation through ion implantation | Rajesh Prasad, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2018-04-03 |