Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934982 | Etch rate modulation through ion implantation | Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2018-04-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934982 | Etch rate modulation through ion implantation | Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2018-04-03 |