Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885957 | Ion-assisted deposition and implantation of photoresist to improve line edge roughness | Tristan Y. Ma, John Hautala | 2018-02-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885957 | Ion-assisted deposition and implantation of photoresist to improve line edge roughness | Tristan Y. Ma, John Hautala | 2018-02-06 |