Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049860 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Naoyuki Suzuki +2 more | 2018-08-14 |
| 9976217 | Film forming method using reversible decomposition reaction | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Kaoru Yamamoto, Satoshi Taga | 2018-05-22 |
| 9896761 | Trap assembly in film forming apparatus | Kaoru Yamamoto, Yasushi Mizusawa | 2018-02-20 |