Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9976217 | Film forming method using reversible decomposition reaction | Atsushi Gomi, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto, Satoshi Taga | 2018-05-22 |
| 9896761 | Trap assembly in film forming apparatus | Masamichi Hara, Kaoru Yamamoto | 2018-02-20 |