Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049860 | Substrate processing apparatus | Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2018-08-14 |
| 9976217 | Film forming method using reversible decomposition reaction | Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto, Satoshi Taga | 2018-05-22 |