Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049860 | Substrate processing apparatus | Atsushi Gomi, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2018-08-14 |
| 10014145 | Vacuum exhaust method | Tomohiro Saito, Tadashi Mitsunaga, Kouji Maeda | 2018-07-03 |