Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153131 | Plasma processing apparatus and plasma processing method | — | 2018-12-11 |
| 10151031 | Method for processing a substrate and substrate processing apparatus | Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano, Shigehiro Miura | 2018-12-11 |
| 10103009 | Plasma processing device and operation method | Shigehiro Miura, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2018-10-16 |
| 10072336 | Film forming apparatus, film forming method, and recording medium | Shigehiro Miura, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2018-09-11 |
| 10026606 | Method for depositing a silicon nitride film | Yutaka Takahashi, Masahiro Murata | 2018-07-17 |
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Katsuyuki Hishiya, Hiroyuki Kikuchi, Shigehiro Ushikubo, Shigenori Ozaki | 2018-04-03 |
| 9865454 | Substrate processing apparatus and substrate processing method | Hiroyuki Kikuchi, Masato Yonezawa, Jun Sato, Shigehiro Miura | 2018-01-09 |