Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Hitoshi Kato, Katsuyuki Hishiya, Hiroyuki Kikuchi, Shigenori Ozaki | 2018-04-03 |