Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991097 | Plasma processing apparatus | Tomohito Komatsu, Yutaka Fujino, Jun NAKAGOMI | 2018-06-05 |
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Hitoshi Kato, Katsuyuki Hishiya, Hiroyuki Kikuchi, Shigehiro Ushikubo | 2018-04-03 |