Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10072336 | Film forming apparatus, film forming method, and recording medium | Hitoshi Kato, Shigehiro Miura, Katsuyoshi Aikawa | 2018-09-11 |
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Hitoshi Kato, Katsuyuki Hishiya, Shigehiro Ushikubo, Shigenori Ozaki | 2018-04-03 |
| 9912272 | Control device, control method of secondary excitation device, and variable speed pumped-storage generating system | Ryan Triadhitama Bin Marwan Awaloeddin, Kiyoshi Kusunoki, Kentaro Kinoshita | 2018-03-06 |
| 9865454 | Substrate processing apparatus and substrate processing method | Hitoshi Kato, Masato Yonezawa, Jun Sato, Shigehiro Miura | 2018-01-09 |
| 9865499 | Method and apparatus for gap fill using deposition and etch processes | Jun Sato, Masahiro Murata, Shigehiro Miura | 2018-01-09 |