Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151034 | Substrate processing method including supplying a fluorine-containing gas on a surface of a substrate | — | 2018-12-11 |
| 10151031 | Method for processing a substrate and substrate processing apparatus | Hitoshi Kato, Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano | 2018-12-11 |
| 10103009 | Plasma processing device and operation method | Hitoshi Kato, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2018-10-16 |
| 10072336 | Film forming apparatus, film forming method, and recording medium | Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2018-09-11 |
| 10043639 | Substrate processing apparatus and substrate processing method | — | 2018-08-07 |
| 9865454 | Substrate processing apparatus and substrate processing method | Hitoshi Kato, Hiroyuki Kikuchi, Masato Yonezawa, Jun Sato | 2018-01-09 |
| 9865499 | Method and apparatus for gap fill using deposition and etch processes | Jun Sato, Hiroyuki Kikuchi, Masahiro Murata | 2018-01-09 |