Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151031 | Method for processing a substrate and substrate processing apparatus | Hitoshi Kato, Jun Sato, Kentaro Oshimo, Tomoko Sugano, Shigehiro Miura | 2018-12-11 |
| 10026606 | Method for depositing a silicon nitride film | Hitoshi Kato, Yutaka Takahashi | 2018-07-17 |
| 9865499 | Method and apparatus for gap fill using deposition and etch processes | Jun Sato, Hiroyuki Kikuchi, Shigehiro Miura | 2018-01-09 |