Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155656 | Inter-poly connection for parasitic capacitor and die size improvement | Shyh-Wei Cheng, Chih-Yu Wang, Hsi-Cheng Hsu, Ji-Hong Chiang, Jui-Chun Weng +2 more | 2018-12-18 |
| 10131536 | Heater design for MEMS chamber pressure control | Shyh-Wei Cheng, Chih-Yu Wang, Hsi-Cheng Hsu, Hsin-Yu Chen, Ji-Hong Chiang +1 more | 2018-11-20 |
| 10049941 | Semiconductor isolation structure with air gaps in deep trenches | Hong-Seng Shue, Tai-I Yang, Ming-Tai Chung, Shao-Chi Yu | 2018-08-14 |
| 9884758 | Selective nitride outgassing process for MEMS cavity pressure control | Shyh-Wei Cheng, Hsi-Cheng Hsu, Hsin-Yu Chen, Ji-Hong Chiang, Jui-Chun Weng +3 more | 2018-02-06 |