Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155656 | Inter-poly connection for parasitic capacitor and die size improvement | Shyh-Wei Cheng, Chih-Yu Wang, Hsi-Cheng Hsu, Ji-Hong Chiang, Shiuan-Jeng Lin +2 more | 2018-12-18 |
| 10131536 | Heater design for MEMS chamber pressure control | Shyh-Wei Cheng, Chih-Yu Wang, Hsi-Cheng Hsu, Hsin-Yu Chen, Ji-Hong Chiang +1 more | 2018-11-20 |
| 9966427 | Metal-insulator-metal (MIM) capacitor with an electrode scheme for improved manufacturability and reliability | Shyh-Wei Cheng, Hung-Lin Chen, Shiuan-Jeng Lin, Tian Sheng Lin, Yu-Jui Wu +2 more | 2018-05-08 |
| 9884758 | Selective nitride outgassing process for MEMS cavity pressure control | Shyh-Wei Cheng, Hsi-Cheng Hsu, Hsin-Yu Chen, Ji-Hong Chiang, Wei-Ding Wu +3 more | 2018-02-06 |
| 9880192 | Method of manufacturing a motion sensor device | Shyh-Wei Cheng, Yu-Ting Hsu, Hsi-Cheng Hsu, Chih-Yu Wang, Che-Jung Chu | 2018-01-30 |