Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155656 | Inter-poly connection for parasitic capacitor and die size improvement | Shyh-Wei Cheng, Chih-Yu Wang, Hsi-Cheng Hsu, Jui-Chun Weng, Shiuan-Jeng Lin +2 more | 2018-12-18 |
| 10131536 | Heater design for MEMS chamber pressure control | Shyh-Wei Cheng, Chih-Yu Wang, Hsi-Cheng Hsu, Hsin-Yu Chen, Jui-Chun Weng +1 more | 2018-11-20 |
| 9884758 | Selective nitride outgassing process for MEMS cavity pressure control | Shyh-Wei Cheng, Hsi-Cheng Hsu, Hsin-Yu Chen, Jui-Chun Weng, Wei-Ding Wu +3 more | 2018-02-06 |