Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155656 | Inter-poly connection for parasitic capacitor and die size improvement | Shyh-Wei Cheng, Chih-Yu Wang, Ji-Hong Chiang, Jui-Chun Weng, Shiuan-Jeng Lin +2 more | 2018-12-18 |
| 10131536 | Heater design for MEMS chamber pressure control | Shyh-Wei Cheng, Chih-Yu Wang, Hsin-Yu Chen, Ji-Hong Chiang, Jui-Chun Weng +1 more | 2018-11-20 |
| 9884758 | Selective nitride outgassing process for MEMS cavity pressure control | Shyh-Wei Cheng, Hsin-Yu Chen, Ji-Hong Chiang, Jui-Chun Weng, Wei-Ding Wu +3 more | 2018-02-06 |
| 9880192 | Method of manufacturing a motion sensor device | Shyh-Wei Cheng, Yu-Ting Hsu, Chih-Yu Wang, Jui-Chun Weng, Che-Jung Chu | 2018-01-30 |